Our two implantation systems: HVEC, and NV10

are in a closed clean room of the company SCHILLING ENGINEERING. This clean room meets the requirements of 

Class 1000 (US FED STD 209E) or Class 100 / ISO Class 5.

For our implantation system: ROBOT150

we have installed a flow box that also meets the requirements of 

class 1000 (US FED STD 209E) or class 100 / ISO class 5 in the field of wafer handling.

Class 1000 (US FED STD 209E) or Class 100 / ISO Class 5.

Upon customer request, products that have increased particle freedom requirements can be processed under Class 100 / ISO Class 5 conditions.