Industry Implantation

High-energy-ion implantation

RUBION and the rubitec GmbH carry out ion irradiations in the MeV range on behalf of the customer. There is a wide range of different ions available. The available energy and dose range depends on the respective species and the wafer size. The possibilities are determined by us depending on the application on request.

We are certified according to DIN EN ISO 9001: 2015

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