Investigation of the chemical composition of ultrathin films deposited by (PE)ALD

This project is dedicated to the thin film analysis of selected materials prepared by using the process integrating cluster tool of the ForLab PICT2DES. Ultrathin dielectric, metallic and semiconducting films prepared via (PE)ALD are investigated, here the focus is on 2D materials. The films are characterized with ion and X-rays to gain insight into the influence of process parameters on the film composition.

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