High-energy-ion-implantation

In the department RUBION ion-beams, in the area of the industrial implantation, ion irradiations in the MeV range are carried out on behalf of customers in cooperation with our partner, the rubitec GmbH. There is a wide range of different ions available. The available energy and dose range depends on the respective species and the wafer size of our customers. The possibilities are determined by us depending on the application for each customer on request. In this field we are certified according to DIN EN ISO 9001: 2015 !