Composition and density characterization of transition metal nitride films

The properties of transition metal nitrides (TM-N) strongly depend on their chemical composition (e.g. TM/N ratio) and density. Both, density and composition are affected by synthesis parameters (e.g. temperature, plasma properties). Transition metal nitrides were synthesized by magnetron sputtering using sets of different process parameters. Mechanical properties like Young’s modulus and hardness are determined by nano indentation and residual stress is evaluated by curvature method. The aim of the project is to identify relationships between synthesis parameters, composition and density and mechanical properties. The project is part of the collaborative research center SFB-TR 87.