Newsportal - Ruhr-Universität Bochum

CLEAN ROOM / FLOWBOX

Our two implantation systems: HVEC und NV10 are in a closed clean room of the company SCHILLING ENGINEERING. This clean room meets the requirements of

Class 1000 (US FED STD 209E) or class 100 / ISO class 5.

For our implantation system ROBOT150 we have installed a flowbox that also meets the requirements of

Class 1000 (US FED STD 209E) or class 100 / ISO class 5 in the field of wafer handling.

For our implantation system ROBOT200 we have a closed clean room from the company solutions-handling. This clean room meets the requirements of

Classe 1000 (US FED STD 209E) or classe 100 / ISO class 5.

Upon customer request, products that have increased particle freedom requirements can be processed under

Classe 100 / ISO class 5 conditions.